EFEM对应高端点胶机器FAD5700-WH
/products/full-automatic-dispensing-machine/semiconductorEFEM对应高端点胶机器FAD5700-WH
开拓晶圆处理新时代的集成解决方案
用晶圆数组对应软件重新映射生产、丝线检查的结果(符合SECS/GEM)
Point
・最先进的半导体工艺(WLP/芯片Let/异种芯片集成)对应
・行业最高水平的KOZ可以实现涂布
・可与EFEM连接的全自动生产
・行业最高水平的KOZ可以实现涂布
・可与EFEM连接的全自动生产
Update
・多头部独立控制,涂布重量自动补正机能搭载。
・为省人化做出贡献的最新UI。
・为省人化做出贡献的最新UI。
・无停止连续动作的高速对准:
Mu SKY Capture机能
・无停止连续动作的高度测量:
Mu SKY Sensing机能
・涂布量自动化:DVM机能
・防止大量不良于未然:AFC机能
・韦赫、FOUP对应
・晶圆映射功能
・结果重新映射(SECSGEM对应) ※选配项
什么是设备前端模块(EFEM)?
EFEM是晶圆的加载、卸载进行模块机器,负责从收纳晶圆的钩子(FOUP:Fonform Unified Pod)和被称为晶圆盒式的容器中,一边保持洁净室的标准,一边自动取出晶圆,运送到工艺装置中有。
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SPECIFICATION概要规格
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名称
DISPENS MASTER
型号
FAD5700-WH
控制方式
PC/PLC控制(符合SMEMA)
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
